Handbook of Semiconductor Manufacturing Technology
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A guide to the individual processes, equipment, and materials of semiconductor manufacturing technologies. It features chapters on silicon materials, SOI materials and devices, surface preparation, ion implantation, dopant diffusion, in-line metrology, yield modeling, photomask fabrication, failure analysis, and damascene copper electroplating.
Информация за "Handbook of Semiconductor Manufacturing Technology"
- SKU 9781574446753
- Weight 2.932000
- ISBN 9781574446753
- Вид корица Hardback
- Издателство Taylor & Francis Inc
- Брой страници 1720
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