Soft X-Rays and Extreme Ultraviolet Radiation
Изчерпано количество
Продуктът не е наличен
Запиши се за известие при зареждане
This self-contained, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The book will be of great interest to graduate students, researchers and practising engineers.
Информация за "Soft X-Rays and Extreme Ultraviolet Radiation"
- SKU 9780521029971
- Weight 0.109000
- ISBN 9780521029971
- Вид корица Paperback
- Издателство Cambridge University Press
- Брой страници 504
The information below is required for social login